biodispositivos mems


The research activity carried out by the Biodevices and MEMS Group focuses on the design and development of ad-hoc systems for detecting and monitoring composites, organisms and biological and chemical parameters. Integral solutions are created via projects with industry from the food and agriculture sector as well as with companies, bodies and hospitals in the area of health. These solutions are personalized to meet client needs and with a view to improving their production processes, maintenance and monitoring.

Research lines

The Group's activities are focused on improving the performance of the final product, and its broad expertise covers aspects such as:

  • Ad-hoc detection systems can include microelectrodes, microfluidic structures, measurement cells, control electronics and external communication
  • Early detection and tracking of microorganisms in different types of arrays, from food samples to biological fluids
  • Improvement of passive devices and implants through active detection and/or recognition tools
  • Design and optimization of microfluidic devices for cell separation and analysis, 2D and 3D cell migration, drug delivery, scaffolds, etc.
  • Sensor integration for parametrizing environments and measurement conditions


The Biodevices and MEMS Group works on projects financed by public calls as well as on industrial projects subject to confidentiality. The projects listed here are ones in which intellectual property rights and confidentiality agreements do not keep the results from being published.


A clean room with class 100, 1,000 and 10,000 areas equipped with laminar flow chemical fume hoods and chemical etching workstations.

  • UV photolithography
  • Deposition of metals and oxides using physical vapor (PVD) and chemical vapor (CVD) deposition techniques
  • Dry (RIE) and wet etching
  • Anodic bonding
  • Hot embossing
  • Wafer cutter
  • Micro soldering station
  • Oxygen plasma chamber
  • Ovens for heat treatments, doping and oxidation
  • Profilometry and atomic force microscopy (AFM)
  • Ellipsometry

A Bioengineering Laboratory that has areas dedicated to microbiology and tissue engineering and is equipped with biosafety cabinets, chemical fume hoods, incubators, an autoclave, 4ºC refrigerators, -20ºC and -80ºC freezers and other standard devices.

  • Impedance meters
  • Potentiostats/galvanostats
  • Surface plasmon resonance (SPR)
  • Quartz crystal microbalance with dissipation (QCM-D)
  • Multimeters and voltage sources
  • Rheometer
  • PDMS polymer workbench
  • Fluorescence, trans-illumination and epi-illumination microscopy
  • Dynamic light scattering (DLS) system
  • Bench-top electrospinning system
  • Bench-top electroplating system
  • FT-IR spectrometer
  • Scanning electron microscope (SEM)

Other Research Groups