Microelectronics & Microsystems

Presentation of the Department

Microelectronics & Microsystems Researcher

The Microelectronics and Microsystems Unit works mainly on the design and development of Microsystems i.e. any miniaturised, low-cost, highly integrated and multifunctional device whether designed to measure a physical, chemical or biological magnitude or to monitor and control an industrial process

In the course of the year 2000, the Unit was integrated into a new, distributed, R&TD centre -"CMIC: Centre for Research on Microsystems" consisting of three technological Centres, two Universities and an Industrial Corporation, with the aim of providing micro&nano technology to the local industry.

Equipment

The Microelectronics and Microsystems Unit has a modern clean room that is equipped with the latest thin-film deposition techniques (Sputter, PE-CVD, LP-CVD), photolithography and etching capabilities. The Unit facilities also include powerful techniques for electric, chemical and optical characterisation of the deposited materials and devices.

Organisation

  • Head of Department Enrique Castaño

 

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Tecnun - universidad de Navarra